Showcase Features the Purion and GSD
Ovation Series of Ion Implanters Designed to Meet the Emerging
Needs of Power Device, Image Sensor, Memory and Logic
Markets
BEVERLY,
Mass., Nov. 30, 2022 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of
enabling ion implantation solutions for the semiconductor industry,
announced today that it will showcase its Purion™ and GSD Ovation™
Series of ion implanters at the SEMICON Japan 2022 exhibition.
The conference and exhibition is being held December 14-16, at the Tokyo Big Sight in
Tokyo, Japan. Axcelis will be
located at Booth #5640.
Semiconductor manufacturers are invited to visit the Axcelis
exhibit to learn first-hand about innovative ion implant solutions
that deliver significant technology and manufacturing
advantages.
- Purion Power Series™ - Featuring Axcelis' innovative
solution for both silicon and silicon carbide (SiC) processing
across the full power device applications space.
- Purion H™ Series - Including the new Purion H5™, the
Purion H200™ and the Purion Dragon™, all designed to provide a
comprehensive solution for high current implants.
- Purion XE™ Series - Including the new Purion XEmax™, is
the industry leading high energy implant platform, featuring
patented Boost Technology™, designed for the most advanced image
sensor applications up to 15MeV.
- Purion M™ Series - Offering the broadest spectrum of
mid-current doses available, enabling unparalleled flexibility to
meet today's evolving implant requirements.
- GSD Ovation™ - Providing the most cost-effective way to
extend high current and high energy batch platform capability with
the highest reliability, serviceability and lowest CoO.
Mary Puma, president and CEO of
Axcelis Technologies, said, "We're excited to be a part of this
important, growing market and the opportunity to provide the most
advanced ion implant technology to Japanese chipmakers to support
the robust demand for power device, image sensor, memory and logic
devices."
Charles Pieczulewski, Axcelis
Country Manager, Japan, commented,
"We're pleased about our expanding installed base in Japan, and remain focused on growing our
market share with both new and established customers by providing
innovative, enabling technology to ensure their success. Japanese
customers continue to be very impressed by the broad product line
offering and the advanced capabilities provided by Axcelis` Purion
and GSD Ovation ion implant technology."
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative,
high-productivity solutions for the semiconductor industry for over
40 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life
cycle support of ion implantation systems, one of the most critical
and enabling steps in the IC manufacturing process. Learn more
about Axcelis at www.axcelis.com.
AXCELIS CONTACTS:
Japan:
Yoshiki Nakashima (Technical
Marketing, Japan)
+81.92.260.3345
ROW:
Maureen Hart (editorial/media)
+1.978.787.4266
Doug Lawson (investor relations)
+1.978.787.9552
View original content to download
multimedia:https://www.prnewswire.com/news-releases/axcelis-announces-participation-in-semicon-japan-2022-301688042.html
SOURCE Axcelis Technologies, Inc.