BEVERLY,
Mass., Nov. 10, 2022 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling
ion implantation solutions for the semiconductor industry, today
announced multiple new and follow-on shipments of the Purion Power
Series ion implanter systems. The shipments went to multiple fabs
in Asia and Europe operated
by leading Si and SiC power device chipmakers. Notably, these
shipments include the first SiC tool shipped from the Axcelis Asia
Operations Center in South Korea.
The models of Purion Power Series implanters™ purchased include the
Purion H200™ high current, Purion XE™ high energy and the Purion M™
medium current implanters, all of which are planned for use in high
volume production of Si and SiC power devices.
![The Purion XE Power Series implanter was designed to meet the growing market demand for the power device market. The Purion Power Series was developed with enabling technology to specifically address the unique needs of emerging power device applications. This includes the flexibility to handle multiple wafer sizes from 150mm to 300mm as well as various substrates including Si, SiC and thin wafers. It also delivers precision wafer temperature control technology, and unmatched productivity. The Purion XE Power Series implanter was designed to meet the growing market demand for the power device market. The Purion Power Series was developed with enabling technology to specifically address the unique needs of emerging power device applications. This includes the flexibility to handle multiple wafer sizes from 150mm to 300mm as well as various substrates including Si, SiC and thin wafers. It also delivers precision wafer temperature control technology, and unmatched productivity.](https://mma.prnewswire.com/media/1943060/Axcelis_PurionXE_PowerSeries.jpg)
President and CEO Mary Puma
commented, "The power device market continues to drive our growth
globally and Axcelis expects to continue to experience strong sales
of Purion Power Series products in this rapidly growing market
segment. Axcelis has a technology advantage and leading market
share in this segment, and we anticipate maintaining this
leadership position as we expand our installed base worldwide."
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative,
high-productivity solutions for the semiconductor industry for over
40 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life
cycle support of ion implantation systems, one of the most critical
and enabling steps in the IC manufacturing process. Learn more
about Axcelis at www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.