BEVERLY,
Mass., Sept. 13, 2022 /PRNewswire/ -- Axcelis
Technologies, Inc. (NASDAQ: ACLS), a leading supplier of enabling
ion implantation solutions for the semiconductor industry,
announced the company's plans to sponsor and participate in the
International Conference on Ion Implantation Technology 2022 (IIT
2022) taking place on September 25-29,
2022, at The US Grant Hotel in San
Diego, CA.
The 23rd Conference in the biannual series is focused on
major challenges in current and emerging technologies related to
ion implantation and annealing processes, device applications,
equipment, metrology and modeling. Axcelis has been a proud
sponsor of the conference for over 40 years.
- Axcelis technologists and collaborators will present the
following topics at the event:
- Advanced Angle Control Requirements and Solutions for Enabling
High Aspect Ratio Device Structures
- Introducing the Purion H200™, Single Wafer High Current
Implanter Designed to Address Unique High Dose Implant
Applications
- Analysis of Dopant Distribution Profiles of Very High Energy
Implants
- Neutron Radiation due to High Energy Boron Ion Beams
- Ion Implanter Beam Optics Design Using Global Optimization
Techniques
- Purion XEmax™, Axcelis Ultra High Energy Implanter with Boost
Technology
- Linac Simulation with Dataset Generator
- Reduction of Wafer Charging Effects with Advanced Electrostatic
Chuck Technologies
- Silicon Damage from Timescale Modulation for Dose Accumulation
in Single Implant and Damage Interactions Between Multiple
Implants
For more information on the event, or to register, visit the
conference website at https://www.mrs.org/iit2022.
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative,
high-productivity solutions for the semiconductor industry for over
40 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life
cycle support of ion implantation systems, one of the most critical
and enabling steps in the IC manufacturing process. Learn more
about Axcelis at www.axcelis.com.
CONTACTS:
Maureen Hart
(editorial/media) 978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.