Tegal Receives Repeat PVD Production System Order From US Customer
January 11 2007 - 9:00AM
Business Wire
Tegal Corporation (Nasdaq:TGAL), a leading designer and
manufacturer of plasma etch and deposition systems used in the
production of integrated circuits and nanotechnology devices, today
announced that it had received a repeat order for its Endeavor AT�
PVD cluster tool from a U.S.-based global leader in power
management device manufacturing. The new Endeavor system will be
shipped to a fab in the U.S. and will be used in the production of
next-generation IGBTs and power MOSFET ICs. Such power management
devices are built into servers, computers, cars, satellites and
home appliances. �The Endeavor PVD System was selected on the basis
of our proven track record in high volume manufacturing at this
global leader in power management devices, the most advanced when
it comes to device production on ultra-thin wafers,� said Thomas
Mika, President and CEO of Tegal Corporation. �The Endeavor PVD
system has proven capability to deposit high purity, stress-free
metal films on unsupported wafers as thin as 65 microns with high
handling yield. This unique capability allows low cost
manufacturing of the most advanced power management devices in the
industry.� �Tegal has continued to offer a high level of support
needed for high-volume IC production,� said Murali Narasimhan, Vice
President of Marketing at Tegal. �Our customer is focused on
enabling technologies in power management for products that work
smarter, run cooler, and raise productivity through innovative
MOSFET technology. Backside Metallization with good adhesion and
Ohmic contact to the current drain of a power MOSFET is essential
for low on-resistance of these devices. Modulation in film stress
through the magnetron technology of the Endeavor�s S-gun based PVD
reactor enables ultra-thin wafers to undergo the PVD process
without cracking.� The Endeavor AT system is a state-of the-art,
ultra-high vacuum PVD cluster tool and is used in production fabs
to deposit consistent, high purity films with low to zero stress
values in an extremely clean process environment. These films are
widely used in under-bump metallization, advanced packaging, power
devices, photo masks (including EUV), high-brightness light
emitting diodes (HB-LEDs), and electro-acoustic devices for FBARs
and MEMS. The Endeavor AT has an easy-to-use GUI, SECS/GEM
communication, reliable low-contact wafer handling and flexible
wafer shape and size capability, that makes it ideal for
ultra-clean production environments for both front-side and
back-side applications. Optional damage-free soft-etch modules and
a variety of RF magnetrons are available to sputter many different
dielectric and conductive films used in semiconductor and other
electronic device production. Safe Harbor Statement Except for
historical information, matters discussed in this news release
contain forward-looking statements within the meaning of Section
27A of the Securities Act and Section 21E of the Exchange Act.
Forward-looking statements, which are based on assumptions and
describe our future plans, strategies and expectations, are
generally identifiable by the use of the words "anticipate,"
"believe," "estimate," "expect," "intend," "project" or similar
expressions. These forward-looking statements are subject to risks,
uncertainties and assumptions about the Company including, but not
limited to industry conditions, economic conditions, acceptance of
new technologies and market acceptance of the Company's products
and services. All forward-looking statements attributable to us or
persons acting on our behalf are expressly qualified in their
entirety by the cautionary statements in this paragraph. For a
further discussion of these risks and uncertainties, please refer
to the Company's periodic filings with the Securities and Exchange
Commission. About Tegal Tegal provides process and equipment
solutions to leading edge suppliers of advanced semiconductor and
nanotechnology devices. Incorporating unique, patented etch and
deposition technologies, Tegal�s system solutions are backed by
over 35 years of advanced development and over 100 patents. Some
examples of devices enabled by Tegal technology are energy
efficient memories found in portable computers, cellphones, PDAs
and RFID applications; megapixel imaging chips used in digital and
cellphone cameras; power amplifiers for portable handsets and
wireless networking gear; and MEMS devices like accelerometers for
automotive airbags, microfluidic control devices for ink jet
printers; and laboratory-on-a-chip medical test kits. For more
information about Tegal Corporation, visit: www.tegal.com.
Tegal (NASDAQ:TGAL)
Historical Stock Chart
From Jun 2024 to Jul 2024
Tegal (NASDAQ:TGAL)
Historical Stock Chart
From Jul 2023 to Jul 2024