FSI International Receives Multiple ANTARES® System Orders
April 18 2011 - 4:45PM
Business Wire
FSI International, Inc. (Nasdaq: FSII), a leading manufacturer
of surface conditioning equipment for microelectronics
manufacturing, announced today that it received orders for multiple
ANTARES® Cryokinetic cleaning systems. The logic and foundry chip
providers that placed these orders currently use the ANTARES®
system for various BEOL particle removal processes including
particle removal after in-line wafer testing and other high
defectivity steps to focus on improving overall device yield.
Unlike aqueous technologies, Cryokinetic cleaning technology is
uniquely qualified for these applications because of its all-dry
defect removal method. FSI has over 150 ANTARES process modules in
production at foundry and logic device producers worldwide. The
systems are expected to ship in the second half of fiscal 2011.
The ANTARES® system is a fully automated, single-wafer,
Cryokinetic product used for processing 200/300mm wafers with
capabilities to remove nanoscale particles. Cryokinetic processing
technology is an all-dry, non-reactive process that removes
particles through impact by high-velocity cryogenic Ar/N2 aerosol,
and reduces defects without damaging the wafer surface, even on
copper and porous low-k films. The system’s highly efficient dry
cleaning solution can be used for a variety of particle removal
applications in FEOL and BEOL. Many of the leading logic device
manufacturers worldwide utilize the ANTARES system for its defect
reduction and yield improvement benefits.
FSI International, Inc. is a global supplier of surface
conditioning equipment, technology and support services for
microelectronics manufacturing. Using the company’s broad portfolio
of cleaning products, which include batch and single-wafer
platforms for immersion, spray, vapor and cryogenic aerosol
technologies, customers are able to achieve their process
performance, flexibility and productivity goals. The company’s
support services programs provide product and process enhancements
to extend the life of installed FSI equipment, enabling worldwide
customers to realize a higher return on their capital investment.
For more information, visit FSI’s website at
http://www.fsi-intl.com.
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