Trikon's Omega fxP for Silicon Trench Etching Nominated by European Semiconductor Magazine for Best Wafer Processing Tool NEWPORT, Wales, June 15 /PRNewswire-FirstCall/ -- Trikon Technologies, Inc. (NASDAQ:TRKN), a leading provider of wafer fabrication equipment and services to the global semiconductor industry, announced today that its Omega fxP for silicon trench etching has been short listed for best tool in the Eurosemi IC Industry Wafer Processing category. Trikon's Omega fxP is equipped with in-situ interferometric end-point detection (IEPD) allowing semiconductor producers to achieve better yields at lower costs. "Leading power device makers that have recently switched to using Omega ICP etchers in production are benefiting from our industry-leading depth control," commented president and CEO of Trikon Technologies, Dr. John Macneil. "In turn, this leads to higher device yields and lower overall costs through reduced scrap. A major reason for these improvements is the use of IEPD." Dr. Macneil explained, "In a power MOSFET device the depth control of the front-end silicon trench is critical to the performance of the final device. IEPD continuously records the progress of the etch front and automatically terminates the process at a pre-programmed depth." The Eurosemi IC Industry Awards will be announced during SEMICON West, a major industry trade show to be held July 12-14 of this year. The voting period is still open, and individuals may submit their votes at http://www.eurosemi.eu.com/. The awards are given to highlight innovation and best practice in the IC industry where technical achievement is expected and every decision and idea is a potential breakthrough. The awards focus on the people, processes and products that drive the industry forward. They are aimed to recognize the vital individuals and companies that enable a company to achieve success in a competitive global market. About Trikon Technologies Trikon Technologies is a leading provider of wafer fabrication equipment and services to the global semiconductor industry. Trikon develops and manufactures advanced capital equipment for plasma etching and chemical and physical vapor deposition (CVD and PVD) of thin films for use in the production of semiconductor, MEMS and similar devices. These are key components in most advanced electronic products, such as telecommunication devices, consumer and industrial electronics and computers. More information is available at: http://www.trikon.com/. DATASOURCE: Trikon Technologies, Inc. CONTACT: Katrina Bomont, Marketing Publicity Manager of Trikon Technologies, Inc., +44 (0) 1633 414030, or ; or Stew Chalmers of Positio, +1-818-980-3762, or , or investors, Kevin Kirkeby of The Global Consulting Group, +1-646-284-9416, or , both for Trikon Technologies, Inc. Web site: http://www.trikon.com/

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