Nova Pushes Optical CD Boundaries With Nova T500(TM) Stand-Alone Platform
July 14 2008 - 3:04AM
PR Newswire (US)
The Nova T500 Features 250WPH Throughput and 30% Improvement in
Precision REHOVOT, Israel, July 14 /PRNewswire-FirstCall/ -- Nova
Measuring Instruments Ltd. (NASDAQ:NVMI) provider of leading edge
stand-alone metrology and the market leader of integrated metrology
solutions to the semiconductor process control market, today
unveiled its new high throughput high accuracy stand-alone optical
CD platform. The new Nova T500 follows the highly-successful
3090Next metrology tool. It addresses the industry's toughest
challenges - increasing metrology sampling, improving metrology
precision and reducing metrology cost of ownership. "We started our
penetration of the stand-alone Optical CD market about two years
ago based on years of experience with high end Integrated
Metrology," said Gabi Seligsohn, President & CEO of Nova. "The
technological advantages of our platform helped make the
penetration successful, resulting in installations in 13 different
fabs. With its record breaking throughput and leading edge
accuracy, I see the Nova T500 as key to continuing our strategy of
providing a state of the art cost effective alternative to CD-SEM
in Lithography and increasing our market share in stand-alone
Optical CD." The Nova T500 provides extremely high throughput of
250WPH (13 measurement sites). Based on Nova's patented Normal
Incidence Spectral Reflectometry, the Nova T500 redesigned optics,
improve metrology precision by 30% over current generation NovaScan
3090Next. The flexible platform allows up to three Measurement
Units to be installed on the same tool, providing an easy and cost
effective path to upgrades as well as adding other metrology
capabilities as they become available. Combined with NovaMARS(TM),
advanced application development software, the Nova T500 has the
ability to measure fine profile parameters on complex 3D test
structures as well as in the device. "In the Nova T500 we designed
the optics to significantly improve spectral accuracy," said Boaz
Brill, VP of Technology at Nova. "The accuracy of the measured
spectra is the most dominant factor in allowing the measurement of
fine profile parameters as well as the key for best fleet matching.
With improved spectral accuracy the Nova T500 provides solution to
32nm demanding Front End of Line applications while maintaining
very high Throughput." About Nova: Nova Measuring Instruments Ltd.
develops, produces and markets advanced integrated and stand alone
metrology solutions for the semiconductor manufacturing industry.
Nova is traded on the NASDAQ & TASE under the symbol NVMI. The
Company's website is http://www.nova.co.il/. The Nova T500
Advantage Record Breaking Throughput Semiconductor manufacturers
are facing tough process and business challenges. On one hand they
are required to increase metrology sampling to cope with shrinking
process windows, new materials and new architectures and on the
other they are required to reduce cost to maintain profitability.
32nm Double Patterning whether Lithography based or Etch based,
dictates higher than before metrology sampling. The Nova T500
throughput of 250WPH (13 sites) offers semiconductor manufacturers
significant metrology CoO reduction and enables them to increase
metrology sampling. The flexible Nova T500 platform offers
configurable throughput capabilities of 135WPH (13 sites) with one
Metrology Unit (MU) and 250WPH (13 sites) with a second MU. For
very dense sampling of 40 sites and more per wafer, as is often the
case for scanner qualification and monitoring, a third MU can be
added. Industry leading precision and matching Shrinking process
windows dictate better understanding of metrology uncertainty
factors. The 2007 International Technology Roadmap for
Semiconductors (ITRS) replaces the single term precision,
representing variability of a single tool over time, with
uncertainty, consisting of three different factors: single tool
measurement-to-measurement variability, tool-to-tool variability
and sample-to-sample variability. Nova's patented Spectral
Reflectometry (SR), designed specifically for best Optical CD
performance, has already shown excellence on all factors in
customer and third party evaluations. The Nova T500 redesigned
optics reduce metrology uncertainty by 30% over current generation
NovaScan 3090Next meeting ITRS requirements down to 22nm technology
node. Upgradability and Extendibility The Nova T500 flexible design
allows up to three metrology units to be installed on the same
tool. In addition to throughput benefits, this design allows easy
and cost effective upgradability to future metrology and
extendibility to different metrology capabilities as they become
available. 3D and In-die Measurements As process windows shrink the
correlation between solid or 2D test structures and the actual
device diminishes. The Nova T500 high accuracy and sensitivity to
profile parameters, combined with NovaMARS, advanced application
development software, provides the ability to measure complex 3D
profile parameters on test structures as well as in the device. New
Tool Operating Software The Nova T500 operating software features
modern Graphics User Interface (GUI) conforming to SEMI standard
E-95 controlling all tool operations including recipe creation,
measurement, results plotting and analysis, troubleshooting,
Preventive Maintenance (PM) and more. An error logging, diagnostic,
handling and recovery module constantly analyzes the tool's health,
handling errors when they occur and increasing Mean Time Between
Interrupts (MTBI). The new "rights management" module supports
simple as well as complex viewing and editing rights management
schemes preventing unwanted recipe change and information leak to
unauthorized personnel. This press release contains forward-looking
statements within the meaning of safe harbor provisions of the
Private Securities Litigation Reform Act of 1995 relating to future
events or our future performance, such as statements regarding
trends, demand for our products, expected deliveries, transaction,
expected revenues, operating results, earnings and profitability.
Forward-looking statements involve known and unknown risks,
uncertainties and other factors that may cause our actual results,
levels of activity, performance or achievements to be materially
different from any future results, levels of activity, performance
or achievements expressed or implied in those forward-looking
statements. These risks and other factors include but are not
limited to: our dependency on a single integrated process control
product line; the highly cyclical nature of the markets we target;
our inability to reduce spending during a slowdown in the
semiconductor industry; our ability to respond effectively on a
timely basis to rapid technological changes; risks associated with
our dependence on a single manufacturing facility; our ability to
expand our manufacturing capacity or marketing efforts to support
our future growth; our dependency on a small number of large
customers and small number of suppliers; risks related to our
intellectual property; changes in customer demands for our
products; new product offerings from our competitors; changes in or
an inability to execute our business strategy; unanticipated
manufacturing or supply problems; changes in tax requirements;
changes in customer demand for our products; risks related to
currency fluctuations and risks related to our operations in
Israel. We cannot guarantee future results, levels of activity,
performance or achievements. The matters discussed in this press
release also involve risks and uncertainties summarized under the
heading ``Risk Factors' in Nova's Annual Report on Form 20-F for
the year ended December 31, 2007 filed with the Securities and
Exchange Commission on March 28, 2008. These factors are updated
from time to time through the filing of reports and registration
statements with the Securities and Exchange Commission. Nova
Measuring Instruments Ltd. does not assume any obligation to update
the forward-looking information contained in this press release
Company Contact: Dror David, Chief Financial Officer Nova Measuring
Instruments Ltd. Tel: +972-8-938-7505 E-mail:
http://www.nova.co.il/ Investor Relations Contacts: Ehud Helft /
Kenny Green GK Investor Relations Tel: +1-646-201-9246 E-mail:
DATASOURCE: Nova Measuring Instruments Ltd CONTACT: Company
Contact: Dror David, Chief Financial Officer, Nova Measuring
Instruments Ltd. Tel: +972-8-938-7505, E-mail: ; Investor Relations
Contacts: Ehud Helft / Kenny Green, GK Investor Relations, Tel:
+1-646-201-9246, E-mail:
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