Nova Introduces an Advanced Scatterometry Modeling and Application Development Tool
July 10 2006 - 8:07AM
PR Newswire (US)
NovaMARS(TM) Supports the Industry's Move to 3D and in-die
Measurements REHOVOT, Israel, July 10 /PRNewswire-FirstCall/ --
Nova Measuring Instruments Ltd. (NASDAQ:NVMI), the market leader in
integrated measurement and process control for the semiconductor
industry, today launched NovaMARS(TM), an advanced Scatterometry
modeling and application development tool. Scatterometry and
Optical CD have become the fastest growing equipment segment in the
process control of semiconductor manufacturing. The NovaMARS
(Metrology Analysis & Recipe Setup) provides a solution for the
latest industry requirements for advanced structure modeling. This
is done by enabling the definition of complex 2D and 3D structures
along with their interfaces, for different layers and parameters.
NovaMARS is designed to work with the NovaScan(r) 3090 and
NovaScan(r) 3090Next metrology systems, available as integrated or
stand-alone systems. The NovaMARS system optimizes metrology tool
performance and significantly shortens the application development
cycle. An automatic or semi-automatic optimization of library
parameters helps reduce the time-to-solution and maintain solution
robustness for production environments. The flexible and intuitive
user interface allows the creation of any 2D/3D and in-die models,
and maximizes metrology tool capabilities for fast measurements.
NovaMARS supports consistency for optimized solutions, which allows
for reduced variability between users, and enables recipe and model
template creation for fast and robust recipe design. NovaMARS is
supported by NovaHPCTM (High Power Computation) for effective and
timely results. It is also available under a scalable and user
configurable infrastructure with Nova's proprietary task management
software, which accelerates recipe set-up and library building.
NovaMARS's modularity also enables customers to purchase a low-cost
entry-level system, using grid computing with the user's existing
computation resources. Bents Kidron, Nova's Director of Marketing,
said, "We anticipate that the NovaMARSTM system will enable us to
maintain our leading position for high-end metrology solutions. It
meets today's and the future's process control needs. We are seeing
the industry trending towards new, more complex designs, with new
materials and tighter design rules. This is forcing higher sampling
of more complex structures with a clear trend for direct in-die
measurements on the actual device. During the past few years, the
optical Scatterometry method has built itself as a powerful
technology used in production control by providing profiling and
measurement of critical dimensions. According to Dataquest it is
one of the fastest growing segments of process control equipment,
expected to grow from US$65M in 2005 to US$170M in 2010. To exploit
these capabilities, process engineers need to carefully model the
desired structure to be measured, and this is where NovaMARSTM is
an invaluable tool. We believe that "if you can't model it, you
can't measure it". About Nova: Nova Measuring Instruments Ltd.
develops designs and produces integrated process control systems in
the semiconductor manufacturing industry. Nova provides a broad
range of integrated process control solutions that link different
semiconductor processes and process equipment. The Company's
website is http://www.nova.co.il/ This press release contains
forward-looking statements within the meaning of safe harbor
provisions of the Private Securities Litigation Reform Act of 1995
relating to future events or our future performance, such as
statements regarding our anticipated market position
Forward-looking statements involve known and unknown risks,
uncertainties and other factors that may cause our actual results,
levels of activity, performance or achievements to be materially
different from any future results, levels of activity, performance
or achievements expressed or implied in those forward-looking
statements. These risks and other factors include but are not
limited to: changes in customer demands for our products, new
product offerings from our competitors, changes in or an inability
to execute our business strategy, unanticipated manufacturing or
supply problems, changes in tax requirements or the applicability
of those requirements to Nova and changes in customer demand for
our products. We cannot guarantee future results, levels of
activity, performance or achievements. The matters discussed in
this press release also involve risks and uncertainties summarized
under the heading "Risk Factors" in Nova's Annual Report on Form
20-F for the year ended December 31, 2005 filed with the Securities
and Exchange Commission on June 29, 2006. These factors are updated
from time to time through the filing of reports and registration
statements with the Securities and Exchange Commission. Nova
Measuring Instruments Ltd. does not assume any obligation to update
the forward-looking information contained in this press release.
DATASOURCE: Nova Measuring Instruments Ltd CONTACT: Company
Contact: Dror David, CFO, Nova Measuring Instruments Ltd., Tel:
+972-8-938-7505, E-mail: , http://www.nova.co.il/, Investor
Relations Contacts: Ehud Helft / Kenny Green, GK Investor
Relations, Tel: +1-866-704-6710, E-mail : ;
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