MTSN Mattson Technology, Inc.

Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it has shipped its Millios® millisecond annealing (MsA) system to another major foundry. The system, which was selected by the customer based on its unique MsA technology and high throughput, will be used to develop and manufacture next-generation structures at the customer's most advanced manufacturing facility.

"Our customer is a leader in developing and manufacturing of new chip technology and selected the Millios as a result of the system's flexible heat pulse capability that delivers high-volume manufacturing for next-generation node requirements," said Pete Lembesis, MsA business leader of Mattson Technology's Thermal Products Group. "This latest shipped system is the third position at a major foundry/logic customer for the Millios, and we expect that revenue contribution from these new wins will provide incremental growth for Mattson Technololgy as the industry moves to future IC nodes. We look forward to continuing our partnership with our key customer as it ramps development and manufacturing for its most advanced wafer fabs."

About Mattson Technology, Inc. Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Rapid Thermal Processing and Etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON / (510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. All statements other than statements of historical fact are statements that could be deemed forward-looking statements, including but not limited to statements of the plans, strategies and objectives of management for future operations. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially from those expressed or implied by such forward-looking statements and assumptions. Such risks and uncertainties include, but are not limited to: macroeconomic and geopolitical trends and events; end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Contact Lauren Vu Mattson Technology, Inc. tel +1-510-492-6250 fax +1-510-492-5914 lauren.vu@mattson.com Investor Contact Laura Guerrant-Oiye Guerrant Associates tel +1-808-882-1467 lguerrant@guerrantir.com