Synopsys and Mattson Collaborate on Advanced TCAD Process Simulation of Technology
July 15 2008 - 9:00AM
PR Newswire (US)
Collaboration Lowers Development Time and Cost Through Accurate
Process Modeling SAN FRANCISCO, July 15 /PRNewswire-FirstCall/ --
SEMICON WEST -- Mattson Technology, Inc. (NASDAQ:MTSN), a leading
supplier of advanced semiconductor process equipment used to
manufacture integrated circuits (ICs), and Synopsys, Inc.
(NASDAQ:SNPS), a world leader in software and IP for semiconductor
design and manufacturing, today announced a collaboration to offer
calibrated process models for flash annealing equipment used on the
45-nanometer (nm) node and beyond. Through this collaboration,
Synopsys' Sentaurus Process models will be calibrated to the
Mattson Millios(TM) flash-assist Rapid Thermal Process (fRTP(TM))
system. As a result, engineers will be able to simulate and
optimize process conditions before costly silicon processing, thus
lowering development time and cost. The continual scaling of CMOS
technology demands new processing techniques to meet the strict
International Technology Roadmap for Semiconductor (ITRS) targets
for junction depth and sheet resistance in the source and drain
extensions of CMOS transistors -- one of the critical device
regions requiring precise process control. To meet this challenge,
Mattson has developed the Millios fRTP system, which features a
powerful flash lamp and highly accurate temperature control and
monitoring that allow engineers to optimize process conditions for
simultaneous achievement of shallow junction depth and low sheet
resistance. The Millios system combines high throughput, precise
process control and process flexibility to provide a high-volume IC
manufacturing solution for milli-second annealing. Sentaurus
Process is Synopsys' multi-dimensional process simulator that is
part of the TCAD Sentaurus suite. It is equipped with a set of
advanced process models that include default parameters calibrated
with data from equipment vendors and provides a predictive
framework for simulating a broad range of technologies from
nanoscale CMOS to large-scale high-voltage power devices. The
combination of these technologies creates a powerful solution for
optimizing the flash-annealing process using the Millios fRTP
system. "Process technologies are increasingly complex and costly
to develop, and therefore TCAD tools with models calibrated to
specific process conditions are very important to guide
experimentation and process optimization," said Howard Ko, senior
vice president and general manager of the Silicon Engineering Group
at Synopsys. "Collaborations with leading equipment vendors such as
Mattson Technology are a critical component of our strategy to
deliver advanced and accurate TCAD tools to the market." Jeff
Gelpey, Mattson fellow, added, "Process development with advanced
tools such as Millios becomes very time consuming and expensive if
done only with experimentation. This collaboration between Synopsys
and us enables the use of Sentaurus TCAD in conjunction with models
calibrated to our equipment so that the development engineer can
optimize the process more quickly and explore many more options."
About Millios In the nanotechnology era, where chips have features
1000 times smaller than the diameter of a human hair, advanced RTP
applications will require annealing that is fractions of, to a few
thousandths of, a second in duration. Mattson's Millios
Flash-Assist RTP (fRTP) is a next-generation millisecond annealing
tool featuring advanced process control and high throughput to meet
manufacturing and development needs. The technique offers effective
process times of 1-3 milliseconds. The system features a patented
arc lamp technology that processes the wafers through millisecond
"flashes" (similar to a camera flash), providing improved thermal
control for ultra-shallow junction (USJ) anneal and other advanced
applications through the 22 nm regime. Millios also combines fully
automated wafer handling hardware and software from Mattson's
production-proven Helios(TM) RTP system. Millios was qualified in
2007 by semiconductor and leading nanoelectronics research centers
in Europe and the United States. About Mattson Mattson Technology,
Inc. is a leading supplier of dry strip equipment and the second
largest supplier of rapid thermal processing equipment in the
global semiconductor industry. The company's strip and RTP
equipment utilize innovative technology to deliver advanced
processing performance and productivity gains to semiconductor
manufacturers worldwide for the fabrication of current- and
next-generation devices. For more information, please contact
Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif.
94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510)
492-5911. Internet: http://www.mattson.com/. About Synopsys TCAD
Technology CAD (TCAD) refers to the use of computer simulation to
model semiconductor processing and device operation. TCAD provides
insight into the fundamental physical phenomena that ultimately
impacts performance and yield. About Synopsys Synopsys, Inc.
(NASDAQ:SNPS) is a world leader in electronic design automation
(EDA), supplying the global electronics market with the software,
intellectual property (IP) and services used in semiconductor
design and manufacturing. Synopsys' comprehensive, integrated
portfolio of implementation, verification, IP, manufacturing and
field-programmable gate array (FPGA) solutions helps address the
key challenges designers and manufacturers face today, such as
power and yield management, system-to-silicon verification and
time-to-results. These technology-leading solutions help give
Synopsys customers a competitive edge in bringing the best products
to market quickly while reducing costs and schedule risk. Synopsys
is headquartered in Mountain View, California, and has more than 60
offices located throughout North America, Europe, Japan, Asia and
India. Visit Synopsys online at http://www.synopsys.com/. Forward
Looking Statements This press release contains forward-looking
statements within the meaning of the safe harbor provisions of
Section 21E of the Securities Exchange Act of 1934, including
statements regarding the expected benefits and results of the
collaboration, on advanced TCAD process simulation of CMOS
technology, between Synopsys and Mattson. These statements are
based on Synopsys' and Mattson's current expectations and beliefs.
Actual results could differ materially from these statements as a
result of unforeseen difficulties in completing the collaboration
and the other factors contained in Synopsys' Quarterly Report on
Form 10-Q for the fiscal quarter ended April 30, 2008 and Mattson's
Quarterly Report on Form 10-Q for the fiscal quarter ended March
30, 2008. Synopsys is a registered trademark of Synopsys, Inc.
fRTP, Millios and Helios are trademarks of Mattson Technology, Inc.
Any other trademarks or registered trademarks mentioned in this
release are the intellectual property of their respective owners.
Editorial Contacts: Sheryl Gulizia Synopsys, Inc. 650-584-8635 Lisa
Gillette-Martin MCA, Inc. 650-968-8900 x115 Jeff Gelpey Mattson
Technology, Inc. 510-492-2765 Laura Guerrant Guerrant Associates
808-882-1467 DATASOURCE: Synopsys, Inc. CONTACT: Sheryl Gulizia of
Synopsys, Inc., +1-650-584-8635, ; or Jeff Gelpey of Mattson
Technology, Inc., +1-510-492-2765, ; or Lisa Gillette-Martin of
MCA, Inc., +1-650-968-8900, ext. 115, ; or Laura Guerrant of
Guerrant Associates, +1-808-882-1467, , both for Synopsys, Inc. Web
site: http://www.synopsys.com/ http://www.mattson.com/
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