Mattson Technology Wins Follow-On Strip and RTP Orders From ProMOS
September 12 2005 - 9:45AM
PR Newswire (US)
FREMONT, Calif., Sept. 12 /PRNewswire-FirstCall/ -- Mattson
Technology, Inc. (NASDAQ:MTSN), a leading supplier of advanced
process equipment used to manufacture semiconductors, today
announced that it has received follow-on orders for its Aspen III
ICPHT and Helios RTP systems from ProMOS Technologies (5387.TWO).
The systems are scheduled to begin shipment in September and will
be used in ProMOS' 300 mm Fab 3 at Central Taiwan Science Park
(CTSP) for the volume production of advanced memory devices,
including 512 Mb and 1 Gb DDR2 DRAM stacked capacitors with 90 nm
technology. "We utilize the most advanced technology to expand our
DRAM manufacturing capacity and ramp up production, allowing us to
deliver high-quality products to the market quickly," said Dr. Len
Mei, senior vice president of ProMOS Technologies. "Mattson's
high-performance, low-cost-of-ownership strip and RTP systems,
along with its excellent customer services in Taiwan, were key
elements in our decision to continue to select the company as a
business partner to supply our process technology requirements."
"Memory chipmakers require advanced tools with processing
capabilities to address the most challenging applications and
increase productivity for manufacturing at the 90 nm node and
beyond," said Randy Y. Matsuda, Mattson Technology's Global
Business Operations vice president & general manager, Asia.
"The excellent processing performance, reliability and high
throughput of our Aspen III ICPHT strip and Helios RTP systems, as
well as our dedicated support, continue to earn us a position as a
vendor of choice at ProMOS." Featuring Mattson's proprietary
inductively coupled plasma (ICP) source technology, the Aspen III
ICPHT provides increased throughput, improved process performance
and reliability for FEOL and BEOL strip applications. The Helios
addresses the most demanding RTP applications, including nickel
silicide formation and ultra-shallow junction spike anneals,
enabled by an advanced model-based temperature control for high
productivity, excellent processing performance and superior
cost-of-ownership. About ProMOS ProMOS Technologies, Hsin-Chu,
Taiwan, is a full-blown memory solution provider and is renowned in
the global DRAM industry for its outstanding performance in
manufacturing excellence and technology advancement. The company
manufactures high-performance and high-density commodity DRAM
memory chips as well as pseudo-SRAM and lower power SDRAM products.
ProMOS is listed on Taiwan GreTai Securities Market. For more
information, please visit http://www.promos.com.tw/. About Mattson
Technology, Inc. Mattson Technology, Inc. is the leading supplier
of dry strip equipment and the second largest supplier of rapid
thermal processing equipment in the global semiconductor industry.
The company's strip and RTP equipment utilize innovative technology
to deliver advanced processing performance and productivity gains
to semiconductor manufacturers worldwide for the fabrication of
current- and next-generation devices. For more information, please
contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont,
Calif. 94538. Telephone: 800-MATTSON/510-657-5900. Fax:
510-492-5911. Internet: http://www.mattson.com/. Mattson Technology
Contact ProMOS Technologies Contact Tanja Froehlingsdorf Dr. Ben
Tseng tel +1-510-492-6342 tel: +886-3-579-8308 fax +1-510-492-2800
fax: +886-3-566-3300 DATASOURCE: Mattson Technology, Inc. CONTACT:
Tanja Froehlingsdorf of Mattson Technology, +1-510-492-6342, or
fax, +1-510-492-2800, or ; or Dr. Ben Tseng of ProMOS Technologies,
+886-3-579-8308, or fax, +886-3-566-3300, or Web site:
http://www.promos.com.tw/ Web site: http://www.mattson.com/
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