MTSN Mattson Technology, Inc.

Mattson Technology Equips ProMOS' Latest 300 mm Taiwan Fab Strip and RTP Systems Used for 90 nm Production of Advanced DRAMs FREMONT, Calif., May 24 /PRNewswire-FirstCall/ -- Mattson Technology, Inc. (NASDAQ:MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that its strip and RTP systems will be used to support the production ramp at ProMOS Technologies' (5387.TWO) newest 300 mm wafer fab in the Central Taiwan Science Park (CTSP), Taiwan. The systems, which include the Aspen III ICPHT and the Helios, will be used in ProMOS' Fab III for the volume production of advanced memory devices, including 512 Mb and 1 G DDR2 stacked capacitors with 90 nm technologies. ProMOS' CTSP fab will comprise two fully automated production lines with a dual-plant design. The facility is expected to produce 80,000 wafers per month by 2010, giving it the largest capacity at a single fab among all 300 mm fabs. "We plan to strengthen our competitive advantage in the DRAM market by investing our latest 300 mm fab with the highest monthly output at a single site in the global IC industry," said Dr. Len Mei, senior vice president, ProMOS Technologies. "The production goals for Fab III demand cost-efficient, state-of-the-art semiconductor equipment that will help us speed the time-to-market of our latest-generation DRAMs. Mattson's strip and RTP tools demonstrated the advanced processing capabilities and cost-of-ownership advantages that we require to meet our aggressive manufacturing targets for the 90 nm technology node and beyond." "ProMOS, one of Taiwan's leading memory manufacturers, selected Mattson Technology as a key strip and RTP supplier based on our systems' excellent processing performance and high productivity, as well as our committed customer support," said Robert B. MacKnight, chief operating officer of Mattson Technology. "These follow-on orders reinforce Mattson's leadership in Taiwan, which commands one-fifth of the world's DRAM devices, and underscore our customer's confidence in our tools to meet its volume production needs for next-generation products. We are pleased to help bring this new 300 mm fab on-line and look forward to supporting ProMOS with the advanced process technologies it requires to expand its operations." About the Aspen III ICPHT Built upon the production-proven Aspen III platform, Mattson Technology's new Aspen III ICPHT utilizes an enhanced RF plasma source with Mattson's proprietary inductively coupled plasma (ICP) technology to provide a wider process window for FEOL and BEOL strip applications. Featuring high-speed, dual-wafer handling and a modular design, the system provides the excellent process performance, high reliability, increased throughput and low cost of ownership (CoO) required for cost-effective chip manufacturing. About the Helios RTP System Mattson Technology's new Helios 300 mm RTP system features an advanced model-based temperature control approach for excellent uniformity, fast ramp and cool-down rates and closed-loop control down to 250 degrees C. The Helios is built on a modular, dual-chamber platform designed for ease of maintenance, high reliability and throughput of over 120 wafers per hour, offering clear cost-of-ownership advantages. The system's high productivity and processing performance address the most demanding RTP applications, including nickel silicide formation and ultra-shallow junction spike anneals. About ProMOS ProMOS Technologies, Hsin-Chu, Taiwan, is a full-blown memory solution provider and is renowned in the global DRAM industry for its outstanding performance in manufacturing excellence and technology advancement. The company manufactures high-performance and high-density commodity DRAM memory chips as well as pseudo- SRAM, lower power SDRAM and MCM products. ProMOS is listed on Taiwan GreTai Securities Market. For more information, please visit http://www.promos.com.tw/. About Mattson Technology, Inc. Mattson Technology, Inc. is the leading supplier of dry strip equipment and the second largest supplier of rapid thermal processing equipment in the global semiconductor industry. The company's strip and RTP equipment utilize innovative technology to deliver advanced processing performance and productivity gains to semiconductor manufacturers worldwide for the fabrication of current- and next-generation devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: 800-MATTSON/510-657-5900. Fax: 510-492-5911. Internet: http://www.mattson.com/. Mattson Technology Contact Lauren Vu Mattson Technology, Inc. tel: +1-510-492-6518 fax: +1-510-492-2800 ProMOS Technologies Contact Dr. Albert Lin Spokesman/VP of Business Development Group tel: +886-3-579-8308 fax: +886-3-566-3300 DATASOURCE: Mattson Technology, Inc. CONTACT: Lauren Vu of Mattson Technology, Inc., +1-510-492-6518, or fax, +1-510-492-2800, or ; or Dr. Albert Lin Spokesman/VP of Business Development Group of ProMOS Technologies, +886-3-579-8308, or fax, +886-3-566-3300, or Web site: http://www.promos.com.tw/ Web site: http://www.mattson.com/

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