Statement of Changes in Beneficial Ownership (4)

FORM 4 [ ] Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549
STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES
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Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940

1. Name and Address of Reporting Person ^* Bintz William J	2. Issuer Name and Ticker or Trading Symbol AXCELIS TECHNOLOGIES INC [ ACLS ]	5. Relationship of Reporting Person(s) to Issuer (Check all applicable) _____ Director _____ 10% Owner __X__ Officer (give title below) _____ Other (specify below) EVP, Product Development
(Last) (First) (Middle) 108 CHERRY HILL DRIVE	3. Date of Earliest Transaction (MM/DD/YYYY) 5/15/2020
(Street) BEVERLY, MA 01915 (City) (State) (Zip)	4. If Amendment, Date Original Filed (MM/DD/YYYY)	6. Individual or Joint/Group Filing (Check Applicable Line) _X _ Form filed by One Reporting Person ___ Form filed by More than One Reporting Person

Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1.Title of Security (Instr. 3)	2. Trans. Date	2A. Deemed Execution Date, if any	3. Trans. Code (Instr. 8)		4. Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5)			5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4)	6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	7. Nature of Indirect Beneficial Ownership (Instr. 4)
1.Title of Security (Instr. 3)	2. Trans. Date	2A. Deemed Execution Date, if any	Code	V	Amount	(A) or (D)	Price		6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	7. Nature of Indirect Beneficial Ownership (Instr. 4)
Common Stock	5/15/2020		A		12615	A	$0.00 ⁽¹⁾	71379 ⁽²⁾	D
Common Stock	5/15/2020		A		12615	A	$0.00 ⁽³⁾	83994 ⁽⁴⁾	D
Common Stock	5/15/2020		F		969	D⁽⁵⁾	$23.52 ⁽⁶⁾	83025 ⁽⁷⁾	D
Common Stock	5/16/2020		F		1504	D⁽⁵⁾	$23.95 ⁽⁶⁾	81521 ⁽⁸⁾	D
Common Stock	5/16/2020		F		598	D⁽⁵⁾	$23.95 ⁽⁶⁾	80923 ⁽⁹⁾	D
Common Stock	5/17/2020		F		735	D⁽⁵⁾	$23.95 ⁽⁶⁾	80188 ⁽¹⁰⁾	D

*Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)*
1. Title of Derivate Security (Instr. 3)	2. Conversion or Exercise Price of Derivative Security	3. Trans. Date	3A. Deemed Execution Date, if any	4. Trans. Code (Instr. 8)		5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5)		6. Date Exercisable and Expiration Date		7. Title and Amount of Securities Underlying Derivative Security (Instr. 3 and 4)		8. Price of Derivative Security (Instr. 5)	9. Number of derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4)	10. Ownership Form of Derivative Security: Direct (D) or Indirect (I) (Instr. 4)	11. Nature of Indirect Beneficial Ownership (Instr. 4)
1. Title of Derivate Security (Instr. 3)	2. Conversion or Exercise Price of Derivative Security	3. Trans. Date	3A. Deemed Execution Date, if any	Code	V	(A)	(D)	Date Exercisable	Expiration Date	Title	Amount or Number of Shares	8. Price of Derivative Security (Instr. 5)			11. Nature of Indirect Beneficial Ownership (Instr. 4)

Explanation of Responses:
(1)	These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2021, May 15, 2022, May 15, 2023 and May 15, 2024.
(2)	Of the shares held after this first grant on May 15, 2020, 48,602 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
(3)	These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Based on the achievement of performance goals and assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2021 and February 28, 2022. Unearned restricted stock units will forfeit on February 28, 2021.
(4)	Of the shares held after this second grant on May 15, 2020, 61,217 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
(5)	These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.
(6)	Represents the closing price of the common stock on the date of the tax withholding.
(7)	Of the shares held after this tax withholding forfeiture (and related vesting) on May 15, 2020, 57,922 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
(8)	Of the shares held after this first tax withholding forfeiture (and related vesting) on May 16, 2020, 52,807 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
(9)	Of the shares held after this second tax withholding forfeiture (and related vesting) on May 16, 2020, 50,774 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
(10)	Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2020, 48,274 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Reporting Owners
Reporting Owner Name / Address	Relationships
Reporting Owner Name / Address	Director	10% Owner	Officer	Other
Bintz William J 108 CHERRY HILL DRIVE BEVERLY, MA 01915			EVP, Product Development