ADE WaferSight System Targets 35nm Processes at Leading Wafer Polishing Manufacturer Peter Wolters; High-Precision Wafer Mapping
October 26 2005 - 11:00AM
Business Wire
ADE Corporation (Nasdaq: ADEX) today announced that the leading
expert in wafer polishing, Peter Wolters AG, has purchased and
installed a WaferSight(TM) advanced wafer geometry system at its
R&D laboratory in Germany. WaferSight provides high resolution
mapping of wafer shape, flatness, thickness and edge roll-off
variations based on ADE's proprietary optical laser interferometry.
The sub-nanometer site flatness measurement precision offers better
control of the polishing process, and supports the ITRS roadmap
requirements at and beyond the 35nm technology node. "The high
precision surface mapping capabilities of the WaferSight, with
integrated edge roll-off analysis, have allowed us to extend the
results of our advanced polishing systems," stated Peter Wolters
R&D Director Dr. Georg Moersch. "WaferSight helps us to have a
better eye on tool performance for double-sided polishing, our AC
line, and is even more important for the haze-free polishing
feature of our newly developed HFP300 system. Within a short period
of time, we have been able to identify and correct several
process-specific signatures thereby further improving polished
wafer quality. WaferSight is a valuable tool as we develop our
equipment and processes for the 35nm technology node in order to
maintain our leading position in this highly competitive market."
ADE's WaferSight offers low cost of ownership dimensional metrology
for wafer suppliers, incoming quality control and semiconductor
equipment manufacturers' R&D applications. In addition to
industry standard wafer thickness, flatness, bow and warp
measurements, the WaferSight system simultaneously measures and
reports wafer edge roll-off (ERO), a critical component of
lithography yield and CMP uniformity and process control.
Production-proven WaferSight systems are available for both 300mm
and advanced 200mm applications with non-contaminating edge-grip
wafer handling. About Peter Wolters AG Peter Wolters AG, the
dominant worldwide supplier of double side and haze free silicon
wafer polishing equipment, is a wholly owned subsidiary of
Novellus. To learn more about Peter Wolters, visit the company's
web site at http://www.peter-wolters.com. About ADE Corporation ADE
Corporation is a leading supplier of metrology and inspection
systems required for production in the silicon wafer, semiconductor
device, magnetic data storage and optics manufacturing industries.
The Company's systems analyze and report product quality at
critical manufacturing process steps for yield enhancement,
providing quality certification data that is relied upon by
semiconductor wafer, device and computer disk manufacturers. The
Company's systems also are used for production measurements in the
semiconductor chip fabrication process. To learn more about ADE,
visit the Company's Web site at http://www.ade.com.
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