By Matt Grossman

 

ASML Holding NV said that some production at a Berlin factory has been disrupted by a fire.

The fire occurred on Jan. 3, the semiconductor-industry supplier said.

"The fire affected part of the production area of the wafer clamp, a module in our EUV systems," the company said. "We are still in the process of completing the recovery plan for this production area and determining how to minimize any potential impact for our EUV customers."

Other production at the facility have continued uninterrupted.

 

Write to Matt Grossman at matt.grossman@wsj.com

 

(END) Dow Jones Newswires

January 07, 2022 07:28 ET (12:28 GMT)

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