Advanced Energy’s 10 kW Power Supply With Advanced Pulsing Offers Industry’s Most Precise, Customizable Plasma Control
December 07 2021 - 6:00AM
Business Wire
Ascent® SMS AP power supply with enhanced arc management and
built-in process characterization capability can be configured to
optimize throughput and yield
Advanced Energy (Nasdaq:AEIS) – a global leader in highly
engineered, precision power conversion, measurement and control
solutions – has expanded its family of plasma power generators with
a 10 kW pulsed DC power supply that combines industry-leading power
and control capabilities with PowerInsight by Advanced Energy™
embedded process optimization software. With patented pulsing
technology, the Ascent® SMS AP (Advanced Pulsing) power supply
brings optimal arc management and precise plasma control to the
most challenging thin film deposition applications ranging from
semiconductor to solar PV manufacturing.
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The compact 10 kW Ascent SMS AP has the widest safe operating
area (SOA) with peak voltages up to 1200 V and frequencies from 0.5
to 150 kHz. Its four-block progressive arc management system with a
full voltage reversal is the industry’s most advanced solution,
providing the lowest arc energy with available self-adjusting arc
parameters that will dynamically move with the process. The AP
waveform delivers boost voltage, reverse voltage control and
advanced pulse shaping that enables fine-tuning to tailor film
morphology and desired film properties.
“Advanced Energy continues to push the performance of pulsed DC
power supplies with unprecedented adaptability in single-magnetron
sputtering applications,” said Dhaval Dhayatkar, senior director of
marketing, plasma power products at Advanced Energy. “Packed with
our most advanced technologies including a highly configurable
waveform, progressive arc management, best-in-class SOA, wide
frequency range and our PowerInsight process optimization software,
the new 10 kW Ascent SMS AP power supply enables our customers to
achieve the highest possible levels of precision, repeatability and
yield in advanced semiconductor processes.”
The new unit is the first AE power supply to embed PowerInsight
process characterization and optimization software. Simplifying the
collection, analysis and translation of data from critical power
delivery systems, PowerInsight provides actionable intelligence
that can be applied to optimize processes for improved throughput
and yield, as well as reduce unplanned downtime of process
equipment. With PowerInsight, Advanced Energy’s pulsed DC power
supplies minimize arcing while enhancing deposition rate, film
morphology and film properties.
For detailed product information and technical specifications,
visit
www.advancedenergy.com/products/plasma-power-generators/pulse-dc-systems/ascent-ap-series.
The 10 kW Ascent SMS AP power supply will be showcased at AE’s
booth 834 at SEMICON West 2021, which takes place December 7-9 at
the Moscone Center in San Francisco, CA.
About Advanced Energy Advanced Energy (Nasdaq:AEIS) is a
global leader in the design and manufacturing of highly engineered,
precision power conversion, measurement and control solutions for
mission-critical applications and processes. AE’s power solutions
enable customer innovation in complex applications for a wide range
of industries including semiconductor equipment, industrial,
manufacturing, telecommunications, data center computing and
healthcare. With engineering know-how and responsive service and
support around the globe, the company builds collaborative
partnerships to meet technology advances, propel growth for its
customers and innovate the future of power. Advanced Energy has
devoted four decades to perfecting power for its global customers
and is headquartered in Denver, Colorado, USA. For more
information, visit www.advancedenergy.com.
Advanced Energy | Precision. Power. Performance.
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version on businesswire.com: https://www.businesswire.com/news/home/20211207005067/en/
For press inquiries: Simon Flatt/Emma Jenkins Grand Bridges
Marketing Limited aei@grandbridges.com +1 310 529 0321
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