BEVERLY, Mass., July 9, 2018 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of
innovative, high-productivity solutions for the semiconductor
industry, announced today that it has released a new Purion Power
Series™ product family to meet the growing market demand for the
power device market. This new product family, which includes
the Purion M Power Series™ for medium current, the Purion H Power
Series™ for high current and the Purion XE Power Series™ for high
energy, was developed with enabling technology to specifically
address the unique needs of emerging power device applications.
Bill Bintz, executive vice
president, product development, commented, "We're excited to offer
a comprehensive solution to our power device manufacturing
customers. The Purion Power Series family is uniquely suited to
excel at these applications due to its innovative platform that
offers the flexibility to handle multiple wafer sizes from 150mm to
300mm as well as various substrates including Si and SiC, along
with its precision wafer temperature control technology, all
accomplished while delivering the industry's highest throughput and
capital efficiency."
John Aldeborgh, executive vice
president, customer operations, commented, "Power devices are one
of the fastest growing segments in IC manufacturing, due to the
robust e-mobility and renewable energy markets. Customer
inquiries and demand for Purion products serving this very active
market have increased, driving significant opportunity for the
Purion Power Series family of products."
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered
in Beverly, Mass., has been
providing innovative, high-productivity solutions for the
semiconductor industry for 40 years. Axcelis is dedicated to
developing enabling process applications through the design,
manufacture and complete life cycle support of ion implantation
systems, one of the most critical and enabling steps in the IC
manufacturing process. Learn more about Axcelis at
www.axcelis.com.
CONTACTS:
Maureen Hart
(editorial/media) 978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.