Nova Awarded SI Editors' Choice 2004 Best Product Award
April 22 2004 - 8:00AM
PR Newswire (US)
Nova Awarded SI Editors' Choice 2004 Best Product Award Nova's
integrated metrology systems for copper CMP are one out of 15
systems awarded by one of the leading magazines in the industry
MUNICH, Germany, April 22 /PRNewswire-FirstCall/ -- Semicon Europa
-- Nova Measuring Instruments Ltd. has received the prestigious
Editors' Choice Best Product Award, presented annually by the
Semiconductor International magazine, for its NovaScan 2020Cu and
3030Cu Integrated Metrology systems for Copper CMP process
monitoring. Semiconductor International announced 15 commercially
proven industry products for excellence in semiconductor
manufacturing. The 2004 entrants exemplified state-of-the-art
equipment and materials, installed and used in numerous fabs around
the world. The awards were handed out to the winners during a
festive event ceremony at the Semicon Europa show. The NovaScan
2020Cu and 3030Cu non-contact, non-intrusive optical measurement
systems using spectrophotometric and imaging technology provide
integrated non-contact and fast erosion measurements, low-K cap
layer removal and copper/barrier residues detection. These combined
optical capabilities enable improved control of the polish process
and elimination of time-consuming off-line measurements. The
systems enable precise control of over-polishing and provide
quantitative data on the electrical performance of the copper lines
for the tightest possible wafer-to-wafer control. 100% sampling of
the wafers for effective CLC that allow prevention of scrap and/or
excursions, makes NovaScan 2020Cu and 3030Cu an efficient tool for
the control of consumables. The NovaScan Copper systems are
available on most polishers, both for 200mm and 300mm copper CMP
processes. The patented technology for measurements on arrays is a
key to real production implementation. Dr. Giora Dishon, President
and CEO, said: "We are very excited that our copper systems
received this important award. Our customers continually report on
exceptional performances of the process equipment with Nova's
integrated metrology systems for copper, reporting on cycle time
reduction between 19 to 77 min. per lot, improvements in equipment
and fab efficiencies, and overall increased productivity of the
dual damascene copper CMP process. The NovaScan Copper systems have
a tremendous potential for 90nm volume manufacturing and are now
being implemented at 7 different sites for high volume
manufacturing at major semiconductor manufacturers all over the
world. The move to 90nm production on 300mm wafers provides a
significant opportunity for us in this industry-wide upturn." 'The
2004 Editors' Choice Best Products program is different from
traditional award competitions in that products are nominated by
users, not by the companies that make or sell the product," noted
Semiconductor International Editor-in-Chief Peter Singer. "After
products were nominated, we gathered additional information inputs
from other users and from the product supplier. We ultimately based
our decision on the superiority of the product in a semiconductor
manufacturing environment." Nova Measuring Instruments Ltd.
develops, designs and produces integrated process control systems
in the semiconductor manufacturing industry. Nova provides a broad
range of integrated process control solutions that link different
semiconductor processes and process equipment. The Company's
website is http://www.nova.co.il/. Semiconductor International,
published by Reed Business Information and a part of Reed
Elsevier's global array of information products, is the leading
technical publication reaching and covering the global
semiconductor manufacturing industry. SI boasts the industry's most
experienced full-time technical editorial team, and has the largest
circulation to semiconductor manufacturers of any industry
publication. Additional information about SI and its many products
and activities are available at http://www.semiconductor.net/ For
more information about the Editors' Choice Product Awards program,
go to http://www.semiconductor.net/awards Company Contact: Chai
Toren, CFO and Vice President Nova Measuring Instruments Ltd. Tel:
972-8-938-7505 E-mail: http://www.nova.co.il/ Investor relations
Contacts: Ehud Helft/Kenny Green Gal IR International Tel:
+1-866-704-6710 E-mail: DATASOURCE: Nova Measuring Instruments Ltd.
CONTACT: Chai Toren, CFO and Vice President of Nova Measuring
Instruments Ltd., +972-8-938-7505, ; Ehud Helft, , or Kenny Green,
, both of Gal IR International, +1-866-704-6710, for Nova Measuring
Instruments Ltd. Web site: http://www.nova.co.il/
http://www.semiconductor.net/
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