MTSN Mattson Technology, Inc.

Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that the Company will host an Analyst Meeting and Breakfast on Wednesday, May 18, 2011, at the Company's Headquarters located at 47131 Bayside Parkway, Fremont, CA 94538. Registration and breakfast begins at 8:00 a.m. PDT, with the program beginning at 9:00 a.m. PDT. The event will conclude at 12:00 p.m. PDT.

David Dutton, President and Chief Executive Officer, and Andrew Moring, Chief Financial Officer, will serve as hosts of the event. In addition, the following executives will present:

• Randy Matsuda, Sr. Vice President and General Manager, Global Business Operations
• Andreas Toennis, Sr. Vice President and General Manager, Thermal Products Group
• Rene George, Vice President and General Manager, Plasma Products Group

Mattson Technology's leadership team will present its newly defined, strategic forward view and plan. Management will also provide an in-depth review of the Company's technologies, their market position, advantages and vision for success, including:

• A new and expanded position in the $4 billion etch market.
• An expanded portfolio of products and customers -- Mattson Technology's Helios XP, SUPREMA, Millios, and paradigmE have all successfully penetrated the foundry, NAND and DRAM markets.
• A company streamlined for financial growth: Operating expenditures are 25% lower than 2007, and the Company is favorably positioned to deliver improved financial performance as gross margins are improved.
• The Company's long-term strategic roadmap

To Attend the Mattson Technology Analyst Event Members of the professional investment community who wish to attend the Analyst Meeting and Breakfast are asked to contact Mattson Technology's Investor Relations consultant Laura Guerrant-Oiye, Principal of Guerrant Associates at (808) 882-1467 or via email at lguerrant@guerrantir.com.

Webcast of Mattson Technology Analyst Event The investor presentation slides, as well as a live and subsequently archived webcast of the presentation, will be made available on the investor page of Mattson Technology's website, http://www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements, including statements related to the Company's potential future financial performance. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's cash position overall, especially as a result of payments made for inventory and the related collections upon shipment of such inventory; end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market, to gain market share with such products and the overall mix of the Company's products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

About Mattson Technology, Inc. Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: dry strip, rapid thermal processing and etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON/(510) 657-5900. Internet: http://www.mattson.com.

Mattson Technology Contact Andy Moring Chief Financial Officer Mattson Technology, Inc. tel 510-657-5900 fax 510-492-5963 andy.moring@mattson.com Investor & Media Contact Laura Guerrant-Oiye Principal Guerrant Associates tel 808-882-1467 lguerrant@guerrantir.com