MTSN Mattson Technology, Inc.

Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced the shipment and installation of the Helios XP rapid thermal processing (RTP) system to a leading Asian foundry. The follow-on evaluation system expands Mattson's RTP installed base at this foundry customer's research and development (R&D) facility, where the Helios XP has been established as the tool of record and is currently being qualified for next-generation process development.

"The Helios XP is delivering on Mattson's initiative to expand our RTP position into the foundry segment," said Andreas Toennis, Senior Vice President and General Manager of Mattson Technology's Thermal Products Group. "The system is the development tool of record at this customer's R&D facility, and the follow-on selection by this leading foundry reinforces its ability to meet the stringent requirements of advanced RTP applications with excellent RTP performance at the lowest cost-of-ownership."

Toennis continued, "The Helios XP's thermal uniformity control across the broadest temperature range gives our customers a wider process flexibility in the same system lowering their cost-of-ownership, while the system's unique HotShield™ technology suppresses pattern loading and temperature effects, enabling improved device yield on advanced IC nodes. We look forward to continuing to partner with this leading foundry customer on the development of advanced RTP applications and solutions for next-generation devices."

About Mattson Technology, Inc. Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Rapid Thermal Processing and Etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON/(510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10 K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Contact Lauren Vu Mattson Technology, Inc. tel +1-510-492-6250 fax +1-510-492-5930 lauren.vu@mattson.com Investor & Media Contact Laura Guerrant-Oiye Guerrant Associates tel +1-808-882-1467 lguerrant@guerrantir.com