MIGDAL HAEMEK, Israel,
June 29, 2015 /PRNewswire/ --
Jordan Valley (JV), a leading
supplier of X-ray based in-line metrology solutions for advanced
semiconductor manufacturers, today announced that it has received
orders for its latest generation JVX7300HR front-end-of-line (FEOL)
strain & thin-film metrology tool from multiple foundries in
Asia.
The innovative JVX7300HR tool provides in-line, first principle
metrology for product-wafers at the 28 nm, and below, technology
nodes. The high-resolution X-ray diffraction (HRXRD) measurement
channel provides a unique monitoring capability for epitaxial
materials, such as SiGe, Si:C, Si:P, providing information on
strain and epitaxial quality on both bulk Si and (FD)SOI
substrates. Additionally, the X-ray reflectivity (XRR) channel
provides thin-film thickness monitoring for complex stacking
including high-k / metal gate (HKMG) stack analysis
Dr. Alex Tokar, JV's worldwide
applications manager explained that JVX7300HR was developed with
the unique challenges that the advanced technology nodes pose. The
tool provides superior performance to its competitors for complex
multi-layer epi and HKMG stacks. High-throughput X-ray metrology
provides unique capabilities compared to traditional optical
techniques with improved productivity and hence reduced CoO. The
JVX7300HR provides advanced capabilities such as reciprocal space
maps (RSMs) on product wafers for development and production ramp
and hybrid metrology support.
Isaac Mazor, JV's CEO added: "Our
unique Fast HRXRD and XRR technologies have been proven to be
crucial for process ramp-up and in-line metrology, especially for
epi. quality monitoring. The JVX7300HR was designed based on our
experience gained working in the fabs of the leading logic players.
Our existing customers appreciate our experience in providing
unique X-ray based metrology solutions. Our customers benefit from
the JVX7300 from faster process ramp-up and control with a lower
cost of measurement."
About the JVX7300HR production metrology tool
The JVX7300HR is a production worthy X-ray metrology tool combining
XRR and HRXRD channels. The tool targets FEOL applications for the
28nm technology node and below. The JVX7300HR supersedes the
JVX7200HR (Best-of-West 2010 award winner)
Jordan Valley's management
will attend Semicon West in San Francisco on July
14-16, 2015. To schedule a meeting, please contact
sales@jvsemi.com
About Jordan Valley Semiconductors Ltd. .
Jordan Valley Semiconductors (JVS), the leader in X-ray metrology
and crystalline defect detection tools for the semiconductor
industry. Jordan Valley's tools are
fully automated non-contacting and non-destructive tools designed
for production control on patterned or blanket wafers.
The company offers the semiconductor industry the most
comprehensive portfolio of advanced metrology and defect inspection
tools, based on X-ray technologies such as XRR (X-ray
reflectometry), XRF (X-ray fluorescence), XRD (X-ray diffraction)
and others.
Jordan Valley's investors include
Clal Industries and Investments Ltd. (TASE: CII), Intel Capital
(NASDAQ: INTC) and Elron Electronics Industries Ltd. (TASE: ELRN).
With headquarters in Migdal Haemek Israel, the company has
subsidiaries in Durham UK,
Austin TX, USA, Hsin-Chu Taiwan,
Suwon Korea and other offices and sales representatives
worldwide.
For more information:
Gali Ashkenazi
Tel: +972-4654-3666
gali.ashkenazi@jordanvalley.com
http://www.jordanvalley.com
SOURCE Jordan Valley